CRYOGENIC VACUUM PUMPS

Cryogenic Vacuum pumps are high vacuum pumps which achieve said vacuum by entrapping gaseous substances on cold surfaces (cryo-panels). HSR AG’s cryogenic pumps are, amongst other things, known for their impeccable performance data and reliability in use. Long operating periods between necessary maintenance breaks provide for high availability as well as seamless and cost effective operation.

features

Pump range is available in nominal sizes from DN100 to DN1250
HSR design reduces cool-down times
Higher cooling power, Higher capacity and superior performance on second stage
Optimized design enables operation in process temperatures up to 3500°C and high gas loads in the same time
Low vibration cooling system
Closed-circuit operation (No need for continuous gas supply)
Patented geometry ensures outstanding up-times and short regeneration times
Highest manufacturing quality

applications

Thin-film coating systems
Space Simulation chambers
Sputter equipment
Fusion test systems
Particle accelerators
Thermal coating systems
Metallizing equipment

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